diff --git a/src/unittests/serialization.spec.ts b/src/unittests/serialization.spec.ts
index 76ac1f715545..7f5384ad9cb5 100644
--- a/src/unittests/serialization.spec.ts
+++ b/src/unittests/serialization.spec.ts
@@ -207,7 +207,7 @@ g.test('value').fn(t => {
       f32
     ),
   ]) {
-    const s = new BinaryStream(new Uint8Array(1024));
+    const s = new BinaryStream(new Uint8Array(1024).buffer);
     serializeValue(s, value);
     const d = new BinaryStream(s.buffer());
     const deserialized = deserializeValue(d);
@@ -244,7 +244,7 @@ g.test('fpinterval_f32').fn(t => {
     FP.f32.toInterval([kValue.f32.negative.subnormal.min, kValue.f32.negative.subnormal.max]),
     FP.f32.toInterval([kValue.f32.negative.infinity, kValue.f32.positive.infinity]),
   ]) {
-    const s = new BinaryStream(new Uint8Array(1024));
+    const s = new BinaryStream(new Uint8Array(1024).buffer);
     serializeFPInterval(s, interval);
     const d = new BinaryStream(s.buffer());
     const deserialized = deserializeFPInterval(d);
@@ -280,7 +280,7 @@ g.test('fpinterval_f16').fn(t => {
     FP.f16.toInterval([kValue.f16.negative.subnormal.min, kValue.f16.negative.subnormal.max]),
     FP.f16.toInterval([kValue.f16.negative.infinity, kValue.f16.positive.infinity]),
   ]) {
-    const s = new BinaryStream(new Uint8Array(1024));
+    const s = new BinaryStream(new Uint8Array(1024).buffer);
     serializeFPInterval(s, interval);
     const d = new BinaryStream(s.buffer());
     const deserialized = deserializeFPInterval(d);
@@ -316,7 +316,7 @@ g.test('fpinterval_abstract').fn(t => {
     FP.abstract.toInterval([kValue.f64.negative.subnormal.min, kValue.f64.negative.subnormal.max]),
     FP.abstract.toInterval([kValue.f64.negative.infinity, kValue.f64.positive.infinity]),
   ]) {
-    const s = new BinaryStream(new Uint8Array(1024));
+    const s = new BinaryStream(new Uint8Array(1024).buffer);
     serializeFPInterval(s, interval);
     const d = new BinaryStream(s.buffer());
     const deserialized = deserializeFPInterval(d);
@@ -338,7 +338,7 @@ g.test('expression_expectation').fn(t => {
     // Intervals
     [FP.f32.toInterval([-8.0, 0.5]), FP.f32.toInterval([2.0, 4.0])],
   ]) {
-    const s = new BinaryStream(new Uint8Array(1024));
+    const s = new BinaryStream(new Uint8Array(1024).buffer);
     serializeExpectation(s, expectation);
     const d = new BinaryStream(s.buffer());
     const deserialized = deserializeExpectation(d);
@@ -368,7 +368,7 @@ g.test('anyOf').fn(t => {
         testCases: [f32(0), f32(10), f32(122), f32(123), f32(124), f32(200)],
       },
     ]) {
-      const s = new BinaryStream(new Uint8Array(1024));
+      const s = new BinaryStream(new Uint8Array(1024).buffer);
       serializeComparator(s, c.comparator);
       const d = new BinaryStream(s.buffer());
       const deserialized = deserializeComparator(d);
@@ -396,7 +396,7 @@ g.test('skipUndefined').fn(t => {
         testCases: [f32(0), f32(10), f32(122), f32(123), f32(124), f32(200)],
       },
     ]) {
-      const s = new BinaryStream(new Uint8Array(1024));
+      const s = new BinaryStream(new Uint8Array(1024).buffer);
       serializeComparator(s, c.comparator);
       const d = new BinaryStream(s.buffer());
       const deserialized = deserializeComparator(d);
diff --git a/src/webgpu/shader/execution/expression/case_cache.ts b/src/webgpu/shader/execution/expression/case_cache.ts
index 88f4a48df4c8..daee31993161 100644
--- a/src/webgpu/shader/execution/expression/case_cache.ts
+++ b/src/webgpu/shader/execution/expression/case_cache.ts
@@ -166,21 +166,21 @@ export class CaseCache implements Cacheable<Record<string, CaseList>> {
    */
   serialize(data: Record<string, CaseList>): Uint8Array {
     const maxSize = 32 << 20; // 32MB - max size for a file
-    const s = new BinaryStream(new Uint8Array(maxSize));
+    const s = new BinaryStream(new Uint8Array(maxSize).buffer);
     s.writeU32(Object.keys(data).length);
     for (const name in data) {
       s.writeString(name);
       s.writeArray(data[name], serializeCase);
     }
-    return s.buffer();
+    return new Uint8Array(s.buffer());
   }
 
   /**
    * deserialize() implements the Cacheable.deserialize interface.
    * @returns the deserialize data.
    */
-  deserialize(buffer: Uint8Array): Record<string, CaseList> {
-    const s = new BinaryStream(buffer);
+  deserialize(array: Uint8Array): Record<string, CaseList> {
+    const s = new BinaryStream(array.buffer);
     const casesByName: Record<string, CaseList> = {};
     const numRecords = s.readU32();
     for (let i = 0; i < numRecords; i++) {
diff --git a/src/webgpu/util/binary_stream.ts b/src/webgpu/util/binary_stream.ts
index 575973afbe0b..4941b9a4dab9 100644
--- a/src/webgpu/util/binary_stream.ts
+++ b/src/webgpu/util/binary_stream.ts
@@ -1,6 +1,6 @@
 import { assert } from '../../common/util/util.js';
-import { Float16Array } from '../../external/petamoriken/float16/float16.js';
 
+import { float16ToUint16, uint16ToFloat16 } from './conversion.js';
 import { align } from './math.js';
 
 /**
@@ -13,178 +13,116 @@ export default class BinaryStream {
    * Constructor
    * @param buffer the buffer to read from / write to. Array length must be a multiple of 8 bytes.
    */
-  constructor(buffer: Uint8Array) {
+  constructor(buffer: ArrayBufferLike) {
     this.offset = 0;
-    this.u8 = buffer;
-    this.u16 = new Uint16Array(this.u8.buffer);
-    this.u32 = new Uint32Array(this.u8.buffer);
-    this.i8 = new Int8Array(this.u8.buffer);
-    this.i16 = new Int16Array(this.u8.buffer);
-    this.i32 = new Int32Array(this.u8.buffer);
-    this.f16 = new Float16Array(this.u8.buffer);
-    this.f32 = new Float32Array(this.u8.buffer);
-    this.f64 = new Float64Array(this.u8.buffer);
+    this.view = new DataView(buffer);
   }
 
   /** buffer() returns the stream's buffer sliced to the 8-byte rounded read or write offset */
-  buffer(): Uint8Array {
-    return this.u8.slice(0, align(this.offset, 8));
+  buffer(): ArrayBufferLike {
+    return new Uint8Array(this.view.buffer, align(this.offset, 8)).buffer;
   }
 
   /** writeBool() writes a boolean as 255 or 0 to the buffer at the next byte offset */
   writeBool(value: boolean) {
-    this.u8[this.offset++] = value ? 255 : 0;
+    this.view.setUint8(this.offset++, value ? 255 : 0);
   }
 
   /** readBool() reads a boolean from the buffer at the next byte offset */
   readBool(): boolean {
-    const val = this.u8[this.offset++];
+    const val = this.view.getUint8(this.offset++);
     assert(val === 0 || val === 255);
     return val !== 0;
   }
 
   /** writeU8() writes a uint8 to the buffer at the next byte offset */
   writeU8(value: number) {
-    this.u8[this.offset++] = value;
+    this.view.setUint8(this.offset++, value);
   }
 
   /** readU8() reads a uint8 from the buffer at the next byte offset */
   readU8(): number {
-    return this.u8[this.offset++];
-  }
-
-  /** u8View() returns a Uint8Array view of the uint8 at the next byte offset */
-  u8View(): Uint8Array {
-    const at = this.offset++;
-    return new Uint8Array(this.u8.buffer, at, 1);
+    return this.view.getUint8(this.offset++);
   }
 
   /** writeU16() writes a uint16 to the buffer at the next 16-bit aligned offset */
   writeU16(value: number) {
-    this.u16[this.bumpWord(2)] = value;
+    this.view.setUint16(this.alignedOffset(2), value, /* littleEndian */ true);
   }
 
   /** readU16() reads a uint16 from the buffer at the next 16-bit aligned offset */
   readU16(): number {
-    return this.u16[this.bumpWord(2)];
-  }
-
-  /** u16View() returns a Uint16Array view of the uint16 at the next 16-bit aligned offset */
-  u16View(): Uint16Array {
-    const at = this.bumpWord(2);
-    return new Uint16Array(this.u16.buffer, at * 2, 1);
+    return this.view.getUint16(this.alignedOffset(2), /* littleEndian */ true);
   }
 
   /** writeU32() writes a uint32 to the buffer at the next 32-bit aligned offset */
   writeU32(value: number) {
-    this.u32[this.bumpWord(4)] = value;
+    this.view.setUint32(this.alignedOffset(4), value, /* littleEndian */ true);
   }
 
   /** readU32() reads a uint32 from the buffer at the next 32-bit aligned offset */
   readU32(): number {
-    return this.u32[this.bumpWord(4)];
-  }
-
-  /** u32View() returns a Uint32Array view of the uint32 at the next 32-bit aligned offset */
-  u32View(): Uint32Array {
-    const at = this.bumpWord(4);
-    return new Uint32Array(this.u32.buffer, at * 4, 1);
+    return this.view.getUint32(this.alignedOffset(4), /* littleEndian */ true);
   }
 
   /** writeI8() writes a int8 to the buffer at the next byte offset */
   writeI8(value: number) {
-    this.i8[this.offset++] = value;
+    this.view.setInt8(this.offset++, value);
   }
 
   /** readI8() reads a int8 from the buffer at the next byte offset */
   readI8(): number {
-    return this.i8[this.offset++];
-  }
-
-  /** i8View() returns a Uint8Array view of the uint8 at the next byte offset */
-  i8View(): Int8Array {
-    const at = this.offset++;
-    return new Int8Array(this.i8.buffer, at, 1);
+    return this.view.getInt8(this.offset++);
   }
 
   /** writeI16() writes a int16 to the buffer at the next 16-bit aligned offset */
   writeI16(value: number) {
-    this.i16[this.bumpWord(2)] = value;
+    this.view.setInt16(this.alignedOffset(2), value, /* littleEndian */ true);
   }
 
   /** readI16() reads a int16 from the buffer at the next 16-bit aligned offset */
   readI16(): number {
-    return this.i16[this.bumpWord(2)];
-  }
-
-  /** i16View() returns a Int16Array view of the uint16 at the next 16-bit aligned offset */
-  i16View(): Int16Array {
-    const at = this.bumpWord(2);
-    return new Int16Array(this.i16.buffer, at * 2, 1);
+    return this.view.getInt16(this.alignedOffset(2), /* littleEndian */ true);
   }
 
   /** writeI32() writes a int32 to the buffer at the next 32-bit aligned offset */
   writeI32(value: number) {
-    this.i32[this.bumpWord(4)] = value;
+    this.view.setInt32(this.alignedOffset(4), value, /* littleEndian */ true);
   }
 
   /** readI32() reads a int32 from the buffer at the next 32-bit aligned offset */
   readI32(): number {
-    return this.i32[this.bumpWord(4)];
-  }
-
-  /** i32View() returns a Int32Array view of the uint32 at the next 32-bit aligned offset */
-  i32View(): Int32Array {
-    const at = this.bumpWord(4);
-    return new Int32Array(this.i32.buffer, at * 4, 1);
+    return this.view.getInt32(this.alignedOffset(4), /* littleEndian */ true);
   }
 
   /** writeF16() writes a float16 to the buffer at the next 16-bit aligned offset */
   writeF16(value: number) {
-    this.f16[this.bumpWord(2)] = value;
+    this.writeU16(float16ToUint16(value));
   }
 
   /** readF16() reads a float16 from the buffer at the next 16-bit aligned offset */
   readF16(): number {
-    return this.f16[this.bumpWord(2)];
-  }
-
-  /** f16View() returns a Float16Array view of the uint16 at the next 16-bit aligned offset */
-  f16View(): Float16Array {
-    const at = this.bumpWord(2);
-    return new Float16Array(this.f16.buffer, at * 2, 1);
+    return uint16ToFloat16(this.readU16());
   }
 
   /** writeF32() writes a float32 to the buffer at the next 32-bit aligned offset */
   writeF32(value: number) {
-    this.f32[this.bumpWord(4)] = value;
+    this.view.setFloat32(this.alignedOffset(4), value, /* littleEndian */ true);
   }
 
   /** readF32() reads a float32 from the buffer at the next 32-bit aligned offset */
   readF32(): number {
-    return this.f32[this.bumpWord(4)];
-  }
-
-  /** f32View() returns a Float32Array view of the uint32 at the next 32-bit aligned offset */
-  f32View(): Float32Array {
-    const at = this.bumpWord(4);
-    return new Float32Array(this.f32.buffer, at * 4, 1);
+    return this.view.getFloat32(this.alignedOffset(4), /* littleEndian */ true);
   }
 
   /** writeF64() writes a float64 to the buffer at the next 64-bit aligned offset */
   writeF64(value: number) {
-    this.f64[this.bumpWord(8)] = value;
+    this.view.setFloat64(this.alignedOffset(8), value);
   }
 
   /** readF64() reads a float64 from the buffer at the next 64-bit aligned offset */
   readF64(): number {
-    return this.f64[this.bumpWord(8)];
-  }
-
-  /** f64View() returns a Float64Array view of the uint64 at the next 64-bit aligned offset */
-  f64View(): Float64Array {
-    const at = this.bumpWord(8);
-    return new Float64Array(this.f64.buffer, at * 8, 1);
+    return this.view.getFloat64(this.alignedOffset(8));
   }
 
   /**
@@ -261,23 +199,15 @@ export default class BinaryStream {
   }
 
   /**
-   * bumpWord() increments this.offset by `bytes`, after first aligning this.offset to `bytes`.
-   * @returns the old offset aligned to the next multiple of `bytes`, divided by `bytes`.
+   * alignedOffset() aligns this.offset to `bytes`, then increments this.offset by `bytes`.
+   * @returns the old offset aligned to the next multiple of `bytes`.
    */
-  private bumpWord(bytes: number) {
-    const multiple = Math.floor((this.offset + bytes - 1) / bytes);
-    this.offset = (multiple + 1) * bytes;
-    return multiple;
+  private alignedOffset(bytes: number) {
+    const aligned = align(this.offset, bytes);
+    this.offset = aligned + bytes;
+    return aligned;
   }
 
   private offset: number;
-  private u8: Uint8Array;
-  private u16: Uint16Array;
-  private u32: Uint32Array;
-  private i8: Int8Array;
-  private i16: Int16Array;
-  private i32: Int32Array;
-  private f16: Float16Array;
-  private f32: Float32Array;
-  private f64: Float64Array;
+  private view: DataView;
 }
diff --git a/src/webgpu/util/floating_point.ts b/src/webgpu/util/floating_point.ts
index f9b9d2ca44ce..82d6403ce3ae 100644
--- a/src/webgpu/util/floating_point.ts
+++ b/src/webgpu/util/floating_point.ts
@@ -107,7 +107,8 @@ export class FPInterval {
   public constructor(kind: FPKind, ...bounds: IntervalBounds) {
     this.kind = kind;
 
-    const [begin, end] = bounds.length === 2 ? bounds : [bounds[0], bounds[0]];
+    const begin = bounds[0];
+    const end = bounds.length === 2 ? bounds[1] : bounds[0];
     assert(!Number.isNaN(begin) && !Number.isNaN(end), `bounds need to be non-NaN`);
     assert(begin <= end, `bounds[0] (${begin}) must be less than or equal to bounds[1]  (${end})`);
 
@@ -206,11 +207,11 @@ export function deserializeFPInterval(s: BinaryStream): FPInterval {
       // Bounded
       switch (kind) {
         case 'abstract':
-          return traits.toInterval([s.readF64(), s.readF64()]);
+          return new FPInterval(traits.kind, s.readF64(), s.readF64());
         case 'f32':
-          return traits.toInterval([s.readF32(), s.readF32()]);
+          return new FPInterval(traits.kind, s.readF32(), s.readF32());
         case 'f16':
-          return traits.toInterval([s.readF16(), s.readF16()]);
+          return new FPInterval(traits.kind, s.readF16(), s.readF16());
       }
       unreachable(`Unable to deserialize FPInterval with kind ${kind}`);
     },