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tobre1FilipovicLado
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FilipovicLado
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Add DRAM wiggle example and HBrO2 model (#133)
* Added initial implementation for mask optical proximity correction * Add psGDSMaskProximity to viennaps namespace * Fixed scaling between rasterization and level set grids, other minor fixes * Multi-Gaussian exposure model and CSV for logger>INFO * Multi-Gaussian exposure model and CSV for logger>INFO * GDS geometry extrusion using level sets with lsExtrude, updated GDSReader example * Added blurring to GDS import using level sets * ... * Gaussian blurring parametrized * Updated GDS import to support transformation * Removed minor redundancy in GDSMaskProximity * Added new GDSGeometry to pyWrap.cpp * fixed merge with master, wrapped updated GDS, updated python GDS example * Fix to adapt to upodated ViennaCore * Remove 'make' folder * Format * Working with different LS and exposure grids * Formatting * Format check * Added python example for oxideRegrowth * Added python example for oxideRegrowth * Separate beam application grid from exposure storage grid * Format GDS example * ExposureLS and ExposureMap stored on coarse grid, only exposure results stored on fine grid. * GDS Reader works in 2D and 3D * Format fix * Fix pyWrap formatting * Improved compatibility for GDS Geometry in 2D and 3D * HBr plasma etching model and DRAM wiggling * Pass GDS file as config parameter * polygon aligned on grid causes seg fault - adjust gridDelta * Implement general plasma etching model * Fix SF6O2 plasma etching * Fix HBrO2 model * Fix GPU SF6O2 etching * Fix Python bindings * update examples and python stubs * add HBrO2 gpu model * Bump version * fix tests --------- Co-authored-by: Lado Filipovic <filipovic@iue.tuwien.ac.at> Co-authored-by: = <=>
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‎.gitignore‎

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*.egg-info
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*env*
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.eggs/
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output/
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*.ptx
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*.optixir
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*.optixir

‎CMakeLists.txt‎

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@@ -2,7 +2,7 @@ cmake_minimum_required(VERSION 3.20 FATAL_ERROR)
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project(
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ViennaPS
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LANGUAGES CXX C
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VERSION 3.4.1)
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VERSION 3.5.0)
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# --------------------------------------------------------------------------------------------------------
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# Library switches
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set(VIENNAPS_LOOKUP_DIRS
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""
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# "${CMAKE_CURRENT_SOURCE_DIR}/../install/"
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CACHE STRING "Directories to account for when searching installed dependencies")
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list(APPEND CMAKE_PREFIX_PATH ${VIENNAPS_LOOKUP_DIRS})

‎README.md‎

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* Installation with CPM
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```cmake
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CPMAddPackage("gh:viennatools/viennaps@3.4.1")
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CPMAddPackage("gh:viennatools/viennaps@3.5.0")
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```
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* With a local installation
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License
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--------------------------
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See file LICENSE in the base directory.
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See file LICENSE in the base directory.

‎cmake/generate_ptx.cmake‎

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target_include_directories(${target_name} PRIVATE ${OptiX_INCLUDE} ${VIENNARAY_GPU_INCLUDE}
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${VIENNAPS_GPU_INCLUDE} ${CUDA_INCLUDE_DIRS})
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target_link_libraries(${target_name} PRIVATE ViennaPS ${VIENNACORE_GPU_LIBS})
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target_compile_definitions(${target_name}
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PRIVATE VIENNACORE_KERNELS_PATH_DEFINE=${VIENNACORE_PTX_DIR})
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endfunction()

‎examples/DRAMWiggling/CMakeLists.txt‎

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project(DRAMWiggling LANGUAGES CXX)
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add_executable(${PROJECT_NAME} "${PROJECT_NAME}.cpp")
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target_link_libraries(${PROJECT_NAME} PRIVATE ViennaPS)
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configure_file(config.txt ${CMAKE_CURRENT_BINARY_DIR}/config.txt COPYONLY)
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# Find all .gds files in the current source directory
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file(GLOB GDS_FILES "${CMAKE_CURRENT_SOURCE_DIR}/*.gds")
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# Copy each .gds file to the binary directory
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foreach(GDS_FILE ${GDS_FILES})
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get_filename_component(FILENAME ${GDS_FILE} NAME)
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configure_file(${GDS_FILE} ${CMAKE_CURRENT_BINARY_DIR}/${FILENAME} COPYONLY)
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endforeach()
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add_dependencies(ViennaPS_Examples ${PROJECT_NAME})
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viennacore_setup_bat(${PROJECT_NAME} ${VIENNAPS_ARTIFACTS_DIRECTORY})

‎examples/DRAMWiggling/DRAMWiggling.cpp‎

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#include <geometries/psMakePlane.hpp>
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#include <models/psHBrO2Etching.hpp>
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#include <psProcess.hpp>
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#include <psUtil.hpp>
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#include <psDomain.hpp>
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#include <psGDSReader.hpp>
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#include <psMaterials.hpp>
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using namespace viennaps;
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int main(int argc, char **argv) {
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using NumericType = double;
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constexpr int D = 3;
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Logger::setLogLevel(LogLevel::ERROR);
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omp_set_num_threads(12);
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// Parse the parameters
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util::Parameters params;
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if (argc > 1) {
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params.readConfigFile(argv[1]);
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} else {
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std::cout << "Usage: " << argv[0] << " <config file>" << std::endl;
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return 1;
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}
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// set parameter units
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units::Length::setUnit(params.get<std::string>("lengthUnit"));
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units::Time::setUnit(params.get<std::string>("timeUnit"));
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constexpr NumericType gridDelta = 0.01 * (1. + 1e-12);
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BoundaryType boundaryConds[D] = {BoundaryType::REFLECTIVE_BOUNDARY,
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BoundaryType::REFLECTIVE_BOUNDARY,
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BoundaryType::INFINITE_BOUNDARY};
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auto mask =
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SmartPointer<GDSGeometry<NumericType, D>>::New(gridDelta, boundaryConds);
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mask->setBoundaryPadding(0.1, 0.1);
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GDSReader<NumericType, D>(mask, params.get<std::string>("gdsFile")).apply();
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// geometry setup
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auto geometry = Domain<NumericType, D>::New();
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auto maskLS = mask->layerToLevelSet(0, 0.0, 0.18);
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geometry->insertNextLevelSetAsMaterial(maskLS, Material::Mask);
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MakePlane<NumericType, D>(geometry, 0.0, Material::Si, true).apply();
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auto modelParams = HBrO2Etching<NumericType, D>::defaultParameters();
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modelParams.ionFlux = params.get("ionFlux");
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modelParams.etchantFlux = params.get("etchantFlux");
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modelParams.passivationFlux = params.get("oxygenFlux");
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modelParams.Ions.meanEnergy = params.get("meanEnergy");
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modelParams.Ions.sigmaEnergy = params.get("sigmaEnergy");
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modelParams.Ions.exponent = params.get("ionExponent");
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modelParams.Ions.n_l = 200;
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auto model = SmartPointer<HBrO2Etching<NumericType, D>>::New(modelParams);
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// Process setup
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Process<NumericType, D> process;
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process.setDomain(geometry);
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process.setProcessModel(model);
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process.setCoverageDeltaThreshold(1e-4);
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process.setNumberOfRaysPerPoint(static_cast<int>(params.get("raysPerPoint")));
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process.setProcessDuration(params.get("processTime"));
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process.setIntegrationScheme(util::convertIntegrationScheme(
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params.get<std::string>("integrationScheme")));
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// print initial surface
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geometry->saveSurfaceMesh("DRAM_Initial.vtp");
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const int numSteps = params.get("numSteps");
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for (int i = 0; i < numSteps; ++i) {
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process.apply();
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geometry->saveSurfaceMesh("DRAM_Etched_" + std::to_string(i + 1) + ".vtp");
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}
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geometry->saveHullMesh("DRAM_Final");
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return 0;
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}

‎examples/DRAMWiggling/DRAMWiggling.py‎

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import viennaps3d as vps
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from argparse import ArgumentParser
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# parse config file name and simulation dimension
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parser = ArgumentParser(
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prog="DRAMWiggling",
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description="Run a DRAM etching process which results in AA wiggling.",
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)
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parser.add_argument("filename")
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args = parser.parse_args()
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gridDelta = 0.01 * (1.0 + 1e-12)
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boundaryConds = [
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vps.ls.BoundaryConditionEnum.REFLECTIVE_BOUNDARY,
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vps.ls.BoundaryConditionEnum.REFLECTIVE_BOUNDARY,
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vps.ls.BoundaryConditionEnum.INFINITE_BOUNDARY,
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]
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params = vps.ReadConfigFile(args.filename)
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mask = vps.GDSGeometry(gridDelta, boundaryConds)
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mask.setBoundaryPadding(0.1, 0.1)
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reader = vps.GDSReader(mask, params["gdsFile"])
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reader.apply()
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# Prepare geometry
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geometry = vps.Domain()
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# Insert GDS layers
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maskLS = mask.layerToLevelSet(0, 0.0, 0.18)
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geometry.insertNextLevelSetAsMaterial(maskLS, vps.Material.Mask)
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# Add plane
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vps.MakePlane(geometry, 0.0, vps.Material.Si, True).apply()
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# print intermediate output surfaces during the process
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vps.Logger.setLogLevel(vps.LogLevel.INFO)
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vps.Length.setUnit(params["lengthUnit"])
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vps.Time.setUnit(params["timeUnit"])
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modelParams = vps.HBrO2Etching.defaultParameters()
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modelParams.ionFlux = params["ionFlux"]
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modelParams.etchantFlux = params["etchantFlux"]
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modelParams.passivationFlux = params["oxygenFlux"]
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modelParams.Ions.meanEnergy = params["meanEnergy"]
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modelParams.Ions.sigmaEnergy = params["sigmaEnergy"]
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modelParams.Ions.exponent = params["ionExponent"]
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modelParams.Ions.n_l = 200
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model = vps.HBrO2Etching(modelParams)
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# process setup
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process = vps.Process()
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process.setDomain(geometry)
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process.setProcessModel(model)
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process.setMaxCoverageInitIterations(10)
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process.setNumberOfRaysPerPoint(int(params["raysPerPoint"]))
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process.setProcessDuration(params["processTime"]) # seconds
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process.setIntegrationScheme(
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vps.util.convertIntegrationScheme(params["integrationScheme"])
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)
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# print initial surface
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geometry.saveSurfaceMesh(filename="DRAM_Initial.vtp", addMaterialIds=True)
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numSteps = int(params["numSteps"])
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for i in range(numSteps):
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# run the process
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process.apply()
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geometry.saveSurfaceMesh(filename=f"DRAM_Etched_{i + 1}.vtp", addMaterialIds=True)
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# print final volume
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geometry.saveHullMesh("DRAM_Final")

‎examples/DRAMWiggling/config.txt‎

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# Config file for a hole etching example process
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# all length units are in micrometers (um)
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# Domain
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lengthUnit=um
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# Process parameters
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processTime=1
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timeUnit=second
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# all flux values are units 1e15 / cm²
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ionFlux=10.
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etchantFlux=4.5e3
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oxygenFlux=2.5e3
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ionExponent=1000
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meanEnergy=200 # eV
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sigmaEnergy=10 # eV
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integrationScheme=LF_2
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numSteps=100
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raysPerPoint=1000
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gdsFile=wiggle_full.gds

‎examples/DRAMWiggling/wiggle.gds‎

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‎examples/DRAMWiggling/wiggle_full.gds‎

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